Si-based near infrared photodetectors operating at 10Gbit/s
Identifieur interne : 009C34 ( Main/Exploration ); précédent : 009C33; suivant : 009C35Si-based near infrared photodetectors operating at 10Gbit/s
Auteurs : Lorenzo Colace [Italie] ; Michele Balbi [Italie] ; Gianlorenzo Masini [Italie] ; Gaetano Assanto [Italie] ; Hsin-Chiao Luan [États-Unis] ; Lionel C. Kimerling [États-Unis]Source :
- Journal of luminescence [ 0022-2313 ] ; 2006.
Descripteurs français
- Pascal (Inist)
English descriptors
- KwdEn :
Abstract
We report on fast p-i-n near infrared photodetectors in pure germanium on silicon. The diodes were fabricated by chemical vapor deposition at 600°C followed by thermal annealing at 900°C. We also verified that bypassing the thermal treatment did not have significant effects on the resulting crystal quality, allowing to considerably reducing the thermal budget hence simplify the integration with silicon. We demonstrate the operation of photodiodes with responsivities of 0.4 and 0.2 A/W at 1.3 and 1.55 μm, respectively, as well as open-eye diagrams at 10 Gbit/s.
Affiliations:
- Italie, États-Unis
- Latium, Massachusetts
- Cambridge (Massachusetts), Rome
- Massachusetts Institute of Technology
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Le document en format XML
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<term>Photodiode</term>
<term>Silicon</term>
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<term>p i n diode</term>
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<keywords scheme="Pascal" xml:lang="fr"><term>Rayonnement IR proche</term>
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<term>Dépôt chimique phase vapeur</term>
<term>Recuit thermique</term>
<term>Photodiode</term>
<term>Diode couche intrinsèque</term>
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<term>Si</term>
<term>8560G</term>
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<front><div type="abstract" xml:lang="en">We report on fast p-i-n near infrared photodetectors in pure germanium on silicon. The diodes were fabricated by chemical vapor deposition at 600°C followed by thermal annealing at 900°C. We also verified that bypassing the thermal treatment did not have significant effects on the resulting crystal quality, allowing to considerably reducing the thermal budget hence simplify the integration with silicon. We demonstrate the operation of photodiodes with responsivities of 0.4 and 0.2 A/W at 1.3 and 1.55 μm, respectively, as well as open-eye diagrams at 10 Gbit/s.</div>
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<name sortKey="Balbi, Michele" sort="Balbi, Michele" uniqKey="Balbi M" first="Michele" last="Balbi">Michele Balbi</name>
<name sortKey="Masini, Gianlorenzo" sort="Masini, Gianlorenzo" uniqKey="Masini G" first="Gianlorenzo" last="Masini">Gianlorenzo Masini</name>
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<country name="États-Unis"><region name="Massachusetts"><name sortKey="Luan, Hsin Chiao" sort="Luan, Hsin Chiao" uniqKey="Luan H" first="Hsin-Chiao" last="Luan">Hsin-Chiao Luan</name>
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<name sortKey="Kimerling, Lionel C" sort="Kimerling, Lionel C" uniqKey="Kimerling L" first="Lionel C." last="Kimerling">Lionel C. Kimerling</name>
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